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The high tech revolution has yielded continually shrinking electronics, but more recently it has also led to the miniaturization of mechanical systems. For the first time, mechanical structures such as gears and micro-electro-mechanical systems (MEMS) such as inertial sensors can be fabricated with features as small as 20 microns.

Tanner Labs is on the leading edge of MEMS and micromachining technology. In addition to developing innovative micromachined devices such as accelerometers and micro-cornercubes that are fabricated through commercially available processes, we are also developing our own affordable CMOS-compatible micromachining processes that can fabricate mechanical and electrical components that are monolithically integrated on a single chip.




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