The high tech revolution has yielded continually shrinking
electronics, but more recently it has also led to the miniaturization
of mechanical systems. For the first time, mechanical structures
such as gears and micro-electro-mechanical systems (MEMS)
such as inertial sensors can be fabricated with features as
small as 20 microns.
Tanner Labs is on the leading edge of MEMS and micromachining
technology. In addition to developing innovative micromachined
devices such as accelerometers and micro-cornercubes
that are fabricated through commercially available processes,
we are also developing our own affordable CMOS-compatible
micromachining processes that
can fabricate mechanical and electrical components that are
monolithically integrated on a single chip.